MEMS and microsystems: Design and manufacture /
Hsu, Tai-Ran
MEMS and microsystems: Design and manufacture / Tai-Ran Hsu - 1st ed. - New Delhi : Tata McGraw-Hill c2002.
MEMS and microsystems: Design and manufacture / Tai-Ran Hsu - 1st ed. - New Delhi : Tata McGraw-Hill c2002.