| 000 | 00415nam a2200133Ia 4500 | ||
|---|---|---|---|
| 001 | 126df2da205b9b9c9143a31c1f7db7655616160b | ||
| 008 | 140104s9999 xx 000 0 und d | ||
| 100 | _aCampbell, Stephen A | ||
| 245 |
_aScience and engineering of microelectronic fabrication / _c Stephen A Campbell |
||
| 250 | _a2nd ed. | ||
| 260 |
_bOxford University Press, _aTokyo : _cc1996. |
||
| 942 | _cBK | ||
| 999 |
_c17463 _d17463 |
||