000 00420nam a2200145Ia 4500
008 140104s9999 xx 000 0 und d
020 _a9788126517909
082 _a621.395 GHA-V2
100 _aGhandhi, Sorab K
245 _aVLSI fabrication principles: Silicon and gallium arsenide /
_c Sorab K Ghandhi
250 _a2nd ed.
260 _bJohn Wiley & Sons Inc.,
_aNew York :
_c2012
942 _cBK
999 _c17585
_d17585