| 000 | 00388nam a2200133Ia 4500 | ||
|---|---|---|---|
| 001 | f4d4b8fca176613594711115e5b6b4b9ee534205 | ||
| 008 | 140104s9999 xx 000 0 und d | ||
| 100 | _aHsu, Tai-Ran | ||
| 245 |
_aMEMS and microsystems: Design and manufacture / _c Tai-Ran Hsu |
||
| 250 | _a1st ed. | ||
| 260 |
_bTata McGraw-Hill _aNew Delhi : _cc2002. |
||
| 942 | _cBK | ||
| 999 |
_c21384 _d21384 |
||