000 00385nam a22001337a 4500
999 _c25046
_d25046
008 180804b ||||| |||| 00| 0 eng d
020 _a9788126566594
082 _a621.38152 SWA-S
100 _aSwaminathan, Parasuraman
245 _aSemiconductor Materials, Devices, and Fabrication
_cParasuraman Swaminathan
260 _aNew Delhi
_bWiley
_c2017
942 _cBK